Darco's Gantry Based 3D Optical Metrology System for Precision Semiconductor Measurement
Gantry-Based 3D Optical Metrology System for Precision Semiconductor Measurement MXP coordinate measuring machines provide the precise and fast measurements required for quality assurance. Our CMMs offer accurate 3D measurements for both contact and non-contact applications. These systems utilize ...
gantry based 3D optical metrology system
,precision semiconductor measurement system
,Semiconductor Measurement Optical Metrology System

| Model | CARINA | URSA | DARCO | ||||||||
| 565 | 686 | 8106 | 10158 | 121510 | 153010 | 8106 | 10158 | 121510 | |||
| Accuracy PH10M+TP20 | MPEe (um) | 1.7+L/333 | 1.8+L/333 | 1.8+L/333 | 2.2+L/333 | 2.4+L/333 | 1.3+L/333 | 1.6+L/333 | 1.9+L/333 | ||
| MPEp (um) | 2.5 | 2.5 | 2.7 | 2.8 | 2.5 | ||||||
| Accuracy PH10M+SP25 | MPEe (um) | 1.5+L/333 | 1.5+L/333 | 1.9+L/333 | 2.1+L/333 | 1.1+L/333 | 1.3+L/333 | 1.6+L/333 | |||
| MPEp (um) | 1.5 | 1.5 | 1.9 | 2.1 | 1.1 | 1.3 | 1.5 | ||||
| Accuracy PH20+TP20 | MPEe (um) | 1.7+L/333 | 1.8+L/333 | 1.8+L/333 | 2.2+L/333 | 2.4+L/333 | 1.3+L/333 | 1.6+L/333 | 1.9+L/333 | ||
| MPEp (um) | 2.5 | 2.5 | 2.7 | 2.8 | 2.5 | ||||||
| Accuracy MH20i | MPEe (um) | 1.7+L/333 | 1.8+L/333 | 1.8+L/333 | 2.2+L/333 | 2.4+L/333 | / | ||||
| MPEp (um) | 2.5 | 2.5 | 2.7 | 2.8 | |||||||
| Accuracy REVO RSP-2 | MPEe (um) | 1.5+L/333 | 1.5+L/333 | 1.9+L/333 | 2.1+L/333 | 1.1+L/333 | 1.3+L/333 | 1.6+L/333 | |||
| MPEp (um) | 1.5 | 1.5 | 1.9 | 2.1 | 1.1 | 1.3 | 1.5 | ||||
| Accuracy REVO RSP-3 | MPEe (um) | 1.5+L/333 | 1.5+L/333 | 1.9+L/333 | 2.1+L/333 | 1.1+L/333 | 1.3+L/333 | 1.6+L/333 | |||
| MPEp (um) | 1.5 | 1.5 | 1.9 | 2.1 | 1.1 | 1.3 | 1.5 | ||||
| Max part loading | 900~1500 | 2000~3000 | 1200~3000 | ||||||||



- Aerospace Industry - Precision measurement of critical components and assemblies
- Automotive Industry - Quality assurance for vehicle parts and systems
- Electronics Industry - High-accuracy inspection of semiconductor and electronic components
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