Precision Gantry Mounted 3D Optical Measuring System For Semiconductor Metrology
Gantry-Mounted 3D Optical Measuring System for Semiconductor Metrology (Darco) Precision Coordinate Measuring Machines MXP coordinate measuring machines deliver the precise and rapid measurements essential for quality assurance. Our CMMs provide accurate 3D measurements for both contact and non...
gantry mounted 3D optical measuring system
,semiconductor metrology measuring machine
,Precision 3d optical measurement system

| Model | CARINA | URSA | DARCO | ||||||||
| 565 | 686 | 8106 | 10158 | 121510 | 153010 | 8106 | 10158 | 121510 | |||
| Accuracy PH10M+TP20 | MPEe (um) | 1.7+L/333 | 1.8+L/333 | 1.8+L/333 | 2.2+L/333 | 2.4+L/333 | 1.3+L/333 | 1.6+L/333 | 1.9+L/333 | ||
| MPEp (um) | 2.5 | 2.5 | 2.7 | 2.8 | 2.5 | ||||||
| Accuracy PH10M+SP25 | MPEe (um) | 1.5+L/333 | 1.5+L/333 | 1.9+L/333 | 2.1+L/333 | 1.1+L/333 | 1.3+L/333 | 1.6+L/333 | |||
| MPEp (um) | 1.5 | 1.5 | 1.9 | 2.1 | 1.1 | 1.3 | 1.5 | ||||
| Accuracy PH20+TP20 | MPEe (um) | 1.7+L/333 | 1.8+L/333 | 1.8+L/333 | 2.2+L/333 | 2.4+L/333 | 1.3+L/333 | 1.6+L/333 | 1.9+L/333 | ||
| MPEp (um) | 2.5 | 2.5 | 2.7 | 2.8 | 2.5 | ||||||
| Accuracy MH20i | MPEe (um) | 1.7+L/333 | 1.8+L/333 | 1.8+L/333 | 2.2+L/333 | 2.4+L/333 | / | ||||
| MPEp (um) | 2.5 | 2.5 | 2.7 | 2.8 | |||||||
| Accuracy REVO RSP-2 | MPEe (um) | 1.5+L/333 | 1.5+L/333 | 1.9+L/333 | 2.1+L/333 | 1.1+L/333 | 1.3+L/333 | 1.6+L/333 | |||
| MPEp (um) | 1.5 | 1.5 | 1.9 | 2.1 | 1.1 | 1.3 | 1.5 | ||||
| Accuracy REVO RSP-3 | MPEe (um) | 1.5+L/333 | 1.5+L/333 | 1.9+L/333 | 2.1+L/333 | 1.1+L/333 | 1.3+L/333 | 1.6+L/333 | |||
| MPEp (um) | 1.5 | 1.5 | 1.9 | 2.1 | 1.1 | 1.3 | 1.5 | ||||
| Max part loading | 900~1500 | 2000~3000 | 1200~3000 | ||||||||

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