Gantry Style Optical CMM Machine For Semiconductor Metrology Industrial Inspection
Advanced Gantry-Style Optical CMM for Semiconductor Metrology – Carina Series Product Description Coordinate Measuring Machines (CMM) MXP coordinate measuring machines provide the precise and fast measurements you need for quality assurance. Our coordinate measuring machines (CMMs) offer precise 3D ...
Gantry Style Optical CMM Machine
,Optical CMM Machine For Semiconductor
,Optical CMM For Industrial Inspection
|
Model
|
CARINA
|
URSA
|
DARCO
|
||||||
|
565
|
686/8106
|
10158
|
121510
|
153010
|
8106
|
10158
|
121510
|
||
|
Accuracy PH10M+TP20
|
MPEe (um)
|
1.7+L/333
|
1.8+L/333
|
1.8+L/333
|
2.2+L/333
|
2.4+L/333
|
1.3+L/333
|
1.6+L/333
|
1.9+L/333
|
|
MPEp (um)
|
2.5
|
2.5
|
2.7
|
2.8
|
2.5
|
||||
|
Accuracy PH10M+SP25
|
MPEe (um)
|
1.5+L/333
|
1.5+L/333
|
1.9+L/333
|
2.1+L/333
|
1.1+L/333
|
1.3+L/333
|
1.6+L/333
|
|
|
MPEp (um)
|
1.5
|
1.5
|
1.9
|
2.1
|
1.1
|
1.3
|
1.5
|
||
|
Accuracy PH20+TP20
|
MPEe (um)
|
1.7+L/333
|
1.8+L/333
|
1.8+L/333
|
2.2+L/333
|
2.4+L/333
|
1.3+L/333
|
1.6+L/333
|
1.9+L/333
|
|
MPEp (um)
|
2.5
|
2.5
|
2.7
|
2.8
|
2.5
|
||||
|
Accuracy MH20i
|
MPEe (um)
|
1.7+L/333
|
1.8+L/333
|
1.8+L/333
|
2.2+L/333
|
2.4+L/333
|
/
|
||
|
MPEp (um)
|
2.5
|
2.5
|
2.7
|
2.8
|
|||||
|
Accuracy REVO RSP-2
|
MPEe (um)
|
1.5+L/333
|
1.5+L/333
|
1.9+L/333
|
2.1+L/333
|
1.1+L/333
|
1.3+L/333
|
1.6+L/333
|
|
|
MPEp (um)
|
1.5
|
1.5
|
1.9
|
2.1
|
1.1
|
1.3
|
1.5
|
||
|
Accuracy REVO RSP-3
|
MPEe (um)
|
1.5+L/333
|
1.5+L/333
|
1.9+L/333
|
2.1+L/333
|
1.1+L/333
|
1.3+L/333
|
1.6+L/333
|
|
|
MPEp (um)
|
1.5
|
1.5
|
1.9
|
2.1
|
1.1
|
1.3
|
1.5
|
||
|
Max part loading
|
900~1500
|
2000~3000
|
1200~3000
|
||||||
Please use our online inquiry contact form below if you have any questions, our team will get back to you as soon as possible.