Darco's High Precision 3D Optical Metrology System Gantry Design for Semiconductors
Darco High-Precision 3D Optical Metrology System MXP coordinate measuring machines deliver the precise, rapid measurements essential for quality assurance in demanding industrial applications. Our CMM systems provide accurate 3D measurements for both contact and non-contact inspection needs, ...
gantry design optical metrology system
,semiconductor 3D Optical Metrology System
,Optical Metrology System for Semiconductors

| Model | CARINA | URSA | DARCO |
|---|---|---|---|
| 565 | 686 | 8106 | 10158 | 121510 | 153010 | 8106 | 10158 | 121510 | |||
| Accuracy PH10M+TP20 | MPEe (um): 1.7+L/333 MPEp (um): 2.5 |
MPEe (um): 1.8+L/333 MPEp (um): 2.5 |
MPEe (um): 1.8+L/333 MPEp (um): 2.7 |
| Accuracy PH10M+SP25 | MPEe (um): 1.5+L/333 MPEp (um): 1.5 |
MPEe (um): 1.5+L/333 MPEp (um): 1.5 |
MPEe (um): 1.9+L/333 MPEp (um): 1.9 |
| Accuracy PH20+TP20 | MPEe (um): 1.7+L/333 MPEp (um): 2.5 |
MPEe (um): 1.8+L/333 MPEp (um): 2.5 |
MPEe (um): 1.8+L/333 MPEp (um): 2.7 |
| Accuracy MH20i | MPEe (um): 1.7+L/333 MPEp (um): 2.5 |
MPEe (um): 1.8+L/333 MPEp (um): 2.5 |
MPEe (um): 1.8+L/333 MPEp (um): 2.7 |
| Accuracy REVO RSP-2 | MPEe (um): 1.5+L/333 MPEp (um): 1.5 |
MPEe (um): 1.5+L/333 MPEp (um): 1.5 |
MPEe (um): 1.9+L/333 MPEp (um): 1.9 |
| Accuracy REVO RSP-3 | MPEe (um): 1.5+L/333 MPEp (um): 1.5 |
MPEe (um): 1.5+L/333 MPEp (um): 1.5 |
MPEe (um): 1.9+L/333 MPEp (um): 1.9 |
| Max part loading | 900~1500 | 2000~3000 | 1200~3000 |

- Aerospace Industry: Precision measurement of critical components and assemblies
- Automotive Industry: Quality assurance for manufacturing and assembly processes
- Electronics Industry: High-accuracy inspection of miniature components and PCBs
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