Gantry Precise 3D CMM Measuring Equipment For Semiconductor Quality Assurance
Carina Series Gantry Measuring System Product Description Coordinate Measuring Machines (CMM) MXP coordinate measuring machines provide the precise and fast measurements you need for quality assurance. Our coordinate measuring machines (CMMs) offer precise 3D measurements for both contact and non...
Semiconductor 3D CMM
,CMM Measuring Equipment for semiconductors
,Gantry Precise CMM Measuring Equipment
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Model
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CARINA
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URSA
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DARCO
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565
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686/8106
|
10158
|
121510
|
153010
|
8106
|
10158
|
121510
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Accuracy PH10M+TP20
|
MPEe (um)
|
1.7+L/333
|
1.8+L/333
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1.8+L/333
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2.2+L/333
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2.4+L/333
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1.3+L/333
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1.6+L/333
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1.9+L/333
|
|
MPEp (um)
|
2.5
|
2.5
|
2.7
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2.8
|
2.5
|
||||
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Accuracy PH10M+SP25
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MPEe (um)
|
1.5+L/333
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1.5+L/333
|
1.9+L/333
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2.1+L/333
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1.1+L/333
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1.3+L/333
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1.6+L/333
|
|
|
MPEp (um)
|
1.5
|
1.5
|
1.9
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2.1
|
1.1
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1.3
|
1.5
|
||
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Accuracy PH20+TP20
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MPEe (um)
|
1.7+L/333
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1.8+L/333
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1.8+L/333
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2.2+L/333
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2.4+L/333
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1.3+L/333
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1.6+L/333
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1.9+L/333
|
|
MPEp (um)
|
2.5
|
2.5
|
2.7
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2.8
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2.5
|
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Accuracy MH20i
|
MPEe (um)
|
1.7+L/333
|
1.8+L/333
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1.8+L/333
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2.2+L/333
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2.4+L/333
|
/
|
||
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MPEp (um)
|
2.5
|
2.5
|
2.7
|
2.8
|
|||||
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Accuracy REVO RSP-2
|
MPEe (um)
|
1.5+L/333
|
1.5+L/333
|
1.9+L/333
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2.1+L/333
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1.1+L/333
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1.3+L/333
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1.6+L/333
|
|
|
MPEp (um)
|
1.5
|
1.5
|
1.9
|
2.1
|
1.1
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1.3
|
1.5
|
||
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Accuracy REVO RSP-3
|
MPEe (um)
|
1.5+L/333
|
1.5+L/333
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1.9+L/333
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2.1+L/333
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1.1+L/333
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1.3+L/333
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1.6+L/333
|
|
|
MPEp (um)
|
1.5
|
1.5
|
1.9
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2.1
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1.1
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1.3
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1.5
|
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Max part loading
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900~1500
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2000~3000
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1200~3000
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