Gantry Type 3D Coordinate Measuring Machine for Precision Semiconductor Metrology
Product Description Coordinate Measuring Machines (CMM) MXP coordinate measuring machines provide the precise and fast measurements you need for quality assurance. Our coordinate measuring machines (CMMs) offer precise 3D measurements for both contact and non-contact needs. They use probes to gather ...
Gantry Type 3D Vision Cmm
,Precision 3D Coordinate Measuring Machine
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Model
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CARINA
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URSA
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DARCO
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565
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686/8106
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10158
|
121510
|
153010
|
8106
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10158
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121510
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Accuracy PH10M+TP20
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MPEe (um)
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1.7+L/333
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1.8+L/333
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1.8+L/333
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2.2+L/333
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2.4+L/333
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1.3+L/333
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1.6+L/333
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1.9+L/333
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MPEp (um)
|
2.5
|
2.5
|
2.7
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2.8
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2.5
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Accuracy PH10M+SP25
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MPEe (um)
|
1.5+L/333
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1.5+L/333
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1.9+L/333
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2.1+L/333
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1.1+L/333
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1.3+L/333
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1.6+L/333
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|
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MPEp (um)
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1.5
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1.5
|
1.9
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2.1
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1.1
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1.3
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1.5
|
||
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Accuracy PH20+TP20
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MPEe (um)
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1.7+L/333
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1.8+L/333
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1.8+L/333
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2.2+L/333
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2.4+L/333
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1.3+L/333
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1.6+L/333
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1.9+L/333
|
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MPEp (um)
|
2.5
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2.5
|
2.7
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2.8
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2.5
|
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Accuracy MH20i
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MPEe (um)
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1.7+L/333
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1.8+L/333
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1.8+L/333
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2.2+L/333
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2.4+L/333
|
/
|
||
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MPEp (um)
|
2.5
|
2.5
|
2.7
|
2.8
|
|||||
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Accuracy REVO RSP-2
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MPEe (um)
|
1.5+L/333
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1.5+L/333
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1.9+L/333
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2.1+L/333
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1.1+L/333
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1.3+L/333
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1.6+L/333
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|
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MPEp (um)
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1.5
|
1.5
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1.9
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2.1
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1.1
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1.3
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1.5
|
||
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Accuracy REVO RSP-3
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MPEe (um)
|
1.5+L/333
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1.5+L/333
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1.9+L/333
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2.1+L/333
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1.1+L/333
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1.3+L/333
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1.6+L/333
|
|
|
MPEp (um)
|
1.5
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1.5
|
1.9
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2.1
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1.1
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1.3
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1.5
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Max part loading
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900~1500
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2000~3000
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1200~3000
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Please use our online inquiry contact form below if you have any questions, our team will get back to you as soon as possible.